FPA-3000 Series
Course No. Course Title Days Applicable Models Schedule
F3001 Intro to Parameters & Commands 5 All 3000 Series steppers Please call for schedule
F3002A Alignment 5 All 3000 Series steppers Please call for schedule
F3002F Focus and Tilt 4 All 3000 Series steppers Please call for schedule
F3003 Stage Evaluation and Troubleshooting 4 i4, iW, EX3 Please call for schedule
F3004I i-line Illumination System 4 i4, iW, i5, i5+ Please call for schedule
F3004R Reticle Changer 3 All 3000 Series steppers Please call for schedule
F3004W Wafer Feeder 3 All 3000 Series steppers Please call for schedule
F3005X Stage Evaluation and Troubleshooting 4 i5, i5+, EX4, EX5, EX6 Please call for schedule
F3006 Periodic Maintenance 5 i4, i5, i5+ Please call for schedule