Three key performance factors are important to litho tool owners:

Improving Resolution

Improving Overlay

Improving Throughput

Canon USA Applications Services offer a wide variety packages that are designed to improve the performance of previously installed Canon photolithography equipment.

Canon Apps Services leverage the experience of Canon Engineers and the capabilities of proprietary analysis tools to increase the overall efficiency of steppers and scanners, all while maintaining or improving the overlay and imaging performance of the system.

Canon Throughput, Overlay and Resolution Enhancement essentially pay for themselves as you optimize and control your critical processes to increase productivity and drive down overlay error.

For more information about any Canon Applications Services,

please contact semi-info@cusa.canon.com.