The NA0.86 projection optics system developed through Canon's advanced lens design and measurement technology enables the ES6a to print down to 90nm.
The AFIS (Advanced Flexible Illuminator System) improves efficiency of special illumination, and its flexible mode-settings allows users to freely design their own illumination modes.
Its high throughput and high resolution enables ES6a to replace some of the ArF layers needed at 90nm production and even at 65nm production, reducing the total cost of ownership.
Feedback
Litho Products
