FPA-6300ES6a

DUV Scanners
Separator

About FPA-6300ES6a


Specifications

Main Unit Spec

Model TypeKrF (248nm) DUV Scanner
Wafer Size300mm
Resolution≤ 90nm
Numerical Aperture (NA)0.50 ~ 0.86
Reticle Size6in. (0.25in. thick)
Reduction Ratio4:1
Field Size26mm x 33mm
Overlay Accuracy≤ 5nm* (|m|+3, Single Tool Overlay)
* Overlay Upgrade Required
Throughput≥ 200wph** (300mm, 98shots)
** High-Throughput Upgrade Required