FPA-3030i5+ Stepper

Steppers
Separator

About FPA-3030i5+ Stepper


Features

  • FPA-3030i5+ imaging system provides 0.35┬Ám resolution with a flexible optical system and lens
  • FPA-3030i5+ platform enhancements help provide alignment accuracy and reliability
  • FPA-3030i5+ platform supports optional equipment designed to process special environmentally-conscious device substrates
  • FPA-3030i5+ platform electrical control system and software are modernized to help support future semiconductor manufacturing