FPA-3030i5+ Stepper

Steppers
Separator

About FPA-3030i5+ Stepper


Specifications

Main Unit Spec

Model Typei-Line (365nm) Stepper
Wafer Size200mm; 150mm
Resolution≤0.35┬Ám
Numerical Aperture (NA)0.45 ~ 0.63
Reticle Size6in. (0.25in. thick); optional 5in.
Reduction Ratio5:1
Field Size22mm x 22mm
Overlay Accuracy≤40nm (|m|+3)
Throughput≥104wph (200mm)
≥120wph (150mm)