FPA-5510iV Stepper

Steppers
Separator

About FPA-5510iV Stepper


Specifications

Main Unit Spec

Model TypeFPA-5510iV
Wafer Size300mm, 200mm
Resolution≤1.50µm
Numerical Aperture (NA)0.10-0.18
Reticle Size6in. (0.25in. thick)
Reduction Ratio2:1
Field Size52mm x 34mm
Overlay Accuracy≤300nm (|m|+3) frontside
≤300nm (|m|+3) backside (option)