FPA-5510iZ Stepper

Steppers
Separator

About FPA-5510iZ Stepper


Specifications

Main Unit Spec

Model Typei-Line (365nm) Stepper
Wafer Size300mm; 200mm
Resolution≤0.28┬Ám *Annular
Numerical Aperture (NA)0.45 ~ 0.57
Reticle Size6in. (0.25in. thick)
Reduction Ratio4:1
Field Size26mm x 33mm
Overlay Accuracy≤20nm (|m|+3)
Throughput≥100wph (300mm)
≥160wph (200mm)