FPA-5550iZ Stepper

Steppers
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About FPA-5550iZ Stepper


Overview

Canon has developed the FPA-5550iZ as a high throughput, 4X i-line mix and match stepper based on FPA-5500 platform that has been a proven winner since it was first launched in 2001. Canon i-line stepper technology meets the high throughput and stability requirements for memory manufacturing in Mega-fabs.