Training - F3002A

F3002A - Alignment


This five-day course is designed to provide the students with in-depth explanation on the alignment system of the FPA-3000 Series steppers. The primary goal is to provide the student with the knowledge required to maintain and optimize the stepper alignment performance.

Performance Objectives
Basics of TVPA
Parameters of TVPA
TVPA sequence
TVPA tuning
Basics of AGA
AGA compensation mode
Alignment error calculations
AGA abnormality check
Calibration command
AGA optimization
Mix & match overlay
AGA multi spot measurements
XY simultaneous measurement AGA


FPA 3000i4 Operations Online Training and F3001 Introduction to Parameters & Commands (Stepper Software)

Applicable Models

All 3000 Series steppers

Course Schedule

Please call for schedule

Email Contact -