Training - F3003

  
  
F3003 - Stage Evaluation and Troubleshooting

Introduction


This four-day course is designed to provide the students with an introduction to the hardware of the air bearing stage and focus system of FPA-3000 Series steppers. The primary goal of this course is to provide the students with the basic knowledge of trouble analysis of these sub-components.

  
Performance Objectives
  
  
X-Y stage pressure and vacuum check
 
  
X-Y stage resistance check
 
  
X-Y stage background vibration analysis
 
  
Visual inspection of main unit interference
 
  
X-Y stage frequency response test
 
  
X-Y stage gain adjustment and T(mean), EGP measurement check
 
  
Coil resistance check
 
  
OPTF unit trouble analysis
 
  
Theta-Z tilt unit piezo replacement
 
  
Prerequisites

FPA 3000 i4 Operations Online Training course and F3006

Applicable Models

i4, EX3, iW

Course Schedule

Please call for schedule
  
Email Contact - semi-registry@cusa.canon.com