Training - F3004I

    
  
F3004I - i-line Illumination System

Introduction


This four-day course introduces the student to repair, maintenance, and adjustment procedures for the i-line illuminator system for 3000 Series steppers.

  
Performance Objectives
  
  
System overview
 
  
Intensity and uniformity
 
  
Intensity degradation checks
 
  
Illumination system calibration
 
  
Uniformity degradation checks
 
  
FRA intensity degradation check
 
  
Exposure shutter replacement
 
  

Prerequisites

FPA 3000 i4 Operations Online Training course and F3006 Periodic Maintenance

Applicable Models

i4, iW, i5, i5+

Course Schedule

Please call for class schedule.

  
Email Contact - semi-registry@cusa.canon.com