Training - F3005X

    
  
F3005X - Stage Evaluation and Troubleshooting

Introduction

This four-day course is designed to provide the students with an introduction to the hardware of the FLAT stage of the FPA-3000 Series steppers. The primary goal of this course is to provide the students with the basic knowledge of trouble analysis of the FLAT stage sub-components.
  
Performance Objectives
  
  
X-Y stage pressure and vacuum check
  
X-Y stage resistance check
  
X-Y stage background vibration analysis
  
Visual inspection of main unit interference
  
T(mean), EGP measurement check
  
Bellows diaphragm adjustment (STGM)
  
Bellow leak check
  
Bellow hysteresis waveform
  
Coil resistance check
 
  

Prerequisites

FPA 3000 i4 Operations Online Training Course and F3006

Applicable Models

i5, i5+, EX4, EX5, EX6

Course Schedule

Please call for schedule

  
Email Contact - semi-registry@cusa.canon.com