Training - F3005X

F3005X - Stage Evaluation and Troubleshooting


This four-day course is designed to provide the students with an introduction to the hardware of the FLAT stage of the FPA-3000 Series steppers. The primary goal of this course is to provide the students with the basic knowledge of trouble analysis of the FLAT stage sub-components.
Performance Objectives
X-Y stage pressure and vacuum check
X-Y stage resistance check
X-Y stage background vibration analysis
Visual inspection of main unit interference
T(mean), EGP measurement check
Bellows diaphragm adjustment (STGM)
Bellow leak check
Bellow hysteresis waveform
Coil resistance check


FPA 3000 i4 Operations Online Training Course and F3006

Applicable Models

i5, i5+, EX4, EX5, EX6

Course Schedule

Please call for schedule

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