Training - F3006

F3006 - Periodic Maintenance


This five-day course covers machine readiness checks, consumable items replacement, and periodic maintenance of the stepper.

Performance Objectives
Machine readiness inspections and corrections
Stage base, reticle changer vacuum pads, and wafer feeder vacuum pads inspection and cleaning
Wafer flatness test and chuck cleaning
Inspection and maintenance of halogen, HeNe laser, and mercury light sources
Reticle rotation checks and update offsets
Auto alignment system checks and update offsets
Focus exposure checks and update offsets
Stage accuracy and matching checks and update offsets
C-Oil level check and replenish


FPA 3000 i4 Operation Online Training course

Applicable Models

i4, i5, i5+

Course Schedule

Please call for schedule

Email Contact -