Training - F3006

  
  
F3006 - Periodic Maintenance

Introduction


This five-day course covers machine readiness checks, consumable items replacement, and periodic maintenance of the stepper.

  
Performance Objectives
  
  
Machine readiness inspections and corrections
  
Stage base, reticle changer vacuum pads, and wafer feeder vacuum pads inspection and cleaning
  
Wafer flatness test and chuck cleaning
  
Inspection and maintenance of halogen, HeNe laser, and mercury light sources
  
Reticle rotation checks and update offsets
  
Auto alignment system checks and update offsets
  
Focus exposure checks and update offsets
  
Stage accuracy and matching checks and update offsets
  
C-Oil level check and replenish
  

Prerequisites

FPA 3000 i4 Operation Online Training course

Applicable Models

i4, i5, i5+

Course Schedule

Please call for schedule

  
Email Contact - semi-registry@cusa.canon.com