Training - F5002A

  
  
F5002A - Alignment Performance

Introduction

This five-day course is designed to provide the students with in-depth explanation on the alignment system of the FPA-5000 Series scanners. The primary goal is to provide the student with the knowledge required to maintain and optimize the stepper alignment performance.
  
Performance Objectives
  
  
Basics of TVPA
  
Parameters of TVPA
  
TVPA sequence
  
TVPA tuning
  
Basics of AGA
  
AGA compensation mode
  
GAUS
  
Alignment error calculations
  
AGA abnormality check
  
Calibration command
  
AGA optimization
  
Mix & match overlay
  
AGA multi spot measurements
  
XY simultaneous measurement AGA
  
ABBE coefficient factor
 
  

Prerequisites

 ES2/ES3 Scanner Operations Online Training course or F5000 ES2/ES3 Basic Fundamentals Class and F5001 Intro to Parameters & Commands

Applicable Models

All 5000 Series steppers

Course Schedule

Please call for schedule

  
Email Contact - semi-registry@cusa.canon.com