Training - F5002A

F5002A - Alignment Performance


This five-day course is designed to provide the students with in-depth explanation on the alignment system of the FPA-5000 Series scanners. The primary goal is to provide the student with the knowledge required to maintain and optimize the stepper alignment performance.

Performance Objectives
Basics of TVPA
Parameters of TVPA
TVPA sequence
TVPA tuning
Basics of AGA
AGA compensation mode
Alignment error calculations
AGA abnormality check
Calibration command
AGA optimization
Mix & match overlay
AGA multi spot measurements
XY simultaneous measurement AGA
ABBE coefficient factor


ES2/ES3 Scanner Operations Online Training course or F5000 ES2/ES3 Basic Fundamentals Class and F5001 Intro to Parameters & Commands

Applicable Models

All 5000 Series steppers

Course Schedule

Please call for schedule

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