Training - F5006

F5006 - Periodic Maintenance


This five-day course covers machine readiness check and periodic maintenance of 5000 Series scanner.

Performance Objectives
Scanner introduction
Illumination optimization
Laser axis adjustment
IL commands and IUC command
Stepping accuracy and repeatability
Reticle scan stage calibration
Best focus
AGA exposure offset
Excimer laser gas information and status check


ES2/ES3 Scanner Operations Online Training course or F5000 ES2/ES3 Basic Fundamentals Class

Applicable Models

All 5000 Series scanners

Course Schedule

Please call for schedule

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