Training - F5006

  
  
F5006 - Periodic Maintenance

Introduction


This five-day course covers machine readiness check and periodic maintenance of 5000 Series scanner.

  
Performance Objectives
  
  
Scanner introduction
  
Illumination optimization
  
Laser axis adjustment
  
IL commands and IUC command
  
Stepping accuracy and repeatability
  
SKEW
  
Reticle scan stage calibration
  
Best focus
  
AGA exposure offset
  
Excimer laser gas information and status check
 
  

Prerequisites

ES2/ES3 Scanner Operations Online Training course or F5000 ES2/ES3 Basic Fundamentals Class

Applicable Models

All 5000 Series scanners

Course Schedule

Please call for schedule

  
Email Contact - semi-registry@cusa.canon.com