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Rotation Precision Exceeding Sub-Microns, High Rigidity, High Endurance, Canon's Air Bearings Have Them All
Canon's air bearings, developed originally as a key component in super-high precision manufacturing technology, have a special structure that gives them superior characteristics such as high rigidity incomparable with any other, high precision, and high endurance.
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AB-30R |
AB-40RVC |
AB-50R
AB-50RV |
AB-50LRVC |
AB-80R
AB-80RV |
AB-100R
AB-100RV |
AB-150R |
AB-200R |
AB-250R |
AB-300R |
AB-400R |
| Radial Rigidity
(N/um) |
12.7 |
24.5 |
24.5 |
49.0 |
34.3 |
55.9 |
98.0 |
166.6 |
205.8 |
392.0 |
333.2 |
| Axial Rigidity
(N/um) |
19.6 |
27.4 |
35.3 |
35.3 |
205.8 |
323.4 |
558.6 |
705.6 |
1176.0 |
1234.8 |
1705.2 |
| Normal Radial
Load (N) |
25.5 |
36.8 |
49.0 |
98.0 |
68.6 |
111.7 |
196.0 |
333.2 |
411.6 |
784.0 |
666.4 |
| Max Radial
Load (N) |
32.3 |
49.0 |
61.7 |
122.5 |
86.2 |
140.1 |
245.0 |
421.4 |
519.4 |
980.0 |
833.0 |
| Normal Axial
Load (N) |
39.2 |
41.1 |
70.6 |
70.6 |
411.6 |
646.8 |
1117.2 |
1411.2 |
2352.0 |
2469.6 |
3410.4 |
| Max Axial Load
(N) |
49.0 |
49.0 |
88.2 |
88.2 |
519.4 |
813.4 |
1401.4 |
1764.0 |
2940.0 |
3087.0 |
4263.0 |
| Radial Rotation
Accuracy (um) |
0.07 |
0.07 |
0.05 |
0.05 |
0.05 |
0.05 |
0.05 |
0.05 |
0.05 |
0.05 |
0.09 |
| Axial Rotation
Accuracy (um) |
0.04 |
0.05 |
0.03 |
0.03 |
0.03 |
0.03 |
0.03 |
0.03 |
0.03 |
0.05 |
0.05 |
| Max Rotation
Speed (rpm) |
30,000 |
24,000 |
20,000 |
22,000 |
15,000 |
10,000 |
5,000 |
3,000 |
2,500 |
1,500 |
500 |
| Air Consumption
(l/min)* |
4 |
5 |
6 |
12 |
8 |
10 |
15 |
20 |
35 |
40 |
40 |
| Rotor I (kg•m2) |
1.23
x 10-5 |
0.85
x 10-4 |
1.925
x 10-4 |
1.925
x 10-4 |
1.32
x 10-3 |
4.85
x 10-3 |
2.975
x 10-2 |
6.0
x 10-2 |
0.2775 |
0.63 |
1.3025 |
| Weight (kg) |
0.3 |
1.0 |
1.5 |
2.3 |
3.9 |
8.5 |
22 |
39 |
77 |
110 |
153 |
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INTRODUCTION
Rotation Precision Exceeding
Sub-Microns, High Rigidity, High Endurance, Canon's
Air Bearings Have Them All
Canon's air bearings, developed originally
as a key component in super-high precision manufacturing
technology, have a special structure that gives them
superior characteristics such as high rigidity incomparable
with any other, high precision, and high endurance.
Rotation Precision Exceeding
Sub-Microns, High Rigidity, High Endurance
Canon’s Air Bearings
Have Them All Canon’s air bearings, developed originally
as a key component in super-high precision manufacturing
technology, have a special structure that gives them
superior characteristics such as high rigidity incomparable
with any other, high precision, and high endurance.
The rotation precision of an air
bearing is designed to be 0.05µm maximum, much more
precise than ball bearings. Another factor that is
crucial in achieving high precision is that the reproducibility
be 0.01µm maximum and that this value can be maintained.
Canon’s air bearings use porous chokes
in their bearings, so even under normal factory supply-air
pressure (490 kpa), they are sufficiently rigid for
common use. Compared with bearings with orifice chokes
and selfformed chokes, the rigidity per unit area
is higher, the flow consumption is about ten times
(one digit) smaller, and the damping capacity is also
higher than that of bearings with other types of chokes.
FEATURES
- The use of carbon-type porous
materials prevents burning and catastrophic failures
due to air during rotation.
- Even with an increased load
capacity, high precision is maintained.
- The highest rotation precision-best
in the industry-is attained both in the radial and
axial directions.
- Because of the little air
consumption, the air compressor could be made compact.
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