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ML-08/1000GA, ML-16/1000GA
Achieved high resolution of 0.8 nm, combined with CI-1000GA
interpolation board
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ML-08/1000GA
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ML-16/1000GA |
Light source
|
LED |
Maximum Resolution
&
Maximum response speed |
100-fold
|
8.0
nm, 80.0 mm / sec.
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16.0
nm, 160.0 mm / sec. |
| 125-fold |
6.4
nm, 80.0 mm / sec.
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12.8
nm, 160.0 mm / sec. |
| 200-fold |
4.0
nm, 68.8 mm / sec.
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8.0
nm, 137.6 mm / sec. |
| 250-fold |
3.2
nm, 54.4 mm / sec.
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6.4
nm, 108.8 mm / sec. |
| 400-fold |
2.0
nm, 34.4 mm / sec.
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4.0
nm, 68.8 mm / sec. |
| 500-fold |
1.6
nm, 27.2 mm / sec.
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3.2
nm, 54.4 mm / sec. |
| 800-fold |
1.0
nm, 16.8 mm / sec.
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2.0
nm, 33.6 mm / sec. |
| 1000-fold |
0.8
nm, 13.6 mm / sec.
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1.6
nm, 27.2 mm / sec. |
A,B phase
incremental *1 |
output
signal
|
2 phase rectangle wave signal |
| signal
type |
Balanced
Line Driver |
| up / down signal *1 |
pulse
width
|
25 nsec ~ 3.2 µsec |
| signal
type |
Balanced
Line Driver |
Z phase
reference |
output signal
|
pulse signal at the right end of scale |
signal type
|
Differential Line Driver |
pulse width
|
100 ± 20 µsec |
Power supply voltage
|
DC + 5.00 V ± 5 % |
| Dimension |
Encoder
Head |
16 x 23 x 16 mm |
| Interpolation
board |
65
x 140 mm |
| Ambient conditions |
operating
temperature
|
10 ~ 40 ºC |
| storage
temperature |
-
10 ~ 50 ºC |
| humidity |
max.
80 %RH (no condensation) |
| Scale |
grating
pitch (at 23 ºC)
|
1.6 µm
|
3.2
µm |
| length |
10
mm
|
10,
50, 100 mm |
| linearity
accuracy *1 |
10
mm : ± 0.08 µm
|
10
mm : ± 0.09 µm
50 mm : ± 0.2 µm
100 mm : ± 0.3 µm |
| expansion
coefficient |
5.2
x 10-7 / ºC (Quartz)
|
10
mm : 5.2 x 10-7 / ºC (Quartz)
50, 100 mm : - 6.5 x 10-7 / ºC (Neoceram) |
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*1) Either A,B phase output or up/down pulse output can be exclusively selected.
*2) Comparison measurement with Laser Interference at 23 ºC
FEATURES
- LED light-diffraction interference
method realize sub-micron resolution
- High precision quartz glass scale.
- Achieved high resolution of 0.8nm,
combined with 1000-fold interpolator.
*1) Either A,B phase output or up/down
pulse output can be exclusively selected.
*2) Comparison measurement with Laser Interference
at 23 ºC |
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