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ML-08, ML-16
LED light-diffraction interference method realize sub-micron resolution
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ML-08 |
ML-16 |
| Light source |
LED |
| Resolution |
0.8 µm |
1.6 µm |
| Maximum response speed |
240 mm / sec |
480 mm / sec. |
A,B phase
incremental |
output signal |
2 phase wave signal |
| signal type |
Sinusoidal differential ( from Connector Nr. 2 )
Sinusoidal single end ( from Connector Nr. 3 )
Rectangle differential line driver ( from Connector Nr. 4 ) |
Z phase
reference |
output signal |
pulse signal at the
right end of scale |
| signal type |
Differential Line Driver |
| pulse width |
100 ± 20 µsec |
| Repeatability |
±
0.8 µm or less
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± 1.6
µm or less |
| Power supply voltage |
DC + 5.00 V ± 5 % |
| Dimension |
Encoder Head |
16 x 23 x 16 mm |
| Connection Box |
60
x 116 x 19.5 mm |
Ambient
conditions |
operating temperature |
10
~ 40 ºC |
| storage temperature |
-
10 ~ 50 ºC |
| humidity |
max.
80 % RH (no condensation) |
| Scale |
grating pitch (at 23 ºC)
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1.6
µm |
3.2 µm |
| length |
10
mm |
10, 50, 100
mm |
| linearity
accuracy *1 |
10
mm : ± 0.08 µm |
10 mm : ±
0.09 µm
50 mm : ± 0.2 µm
100 mm : ± 0.3 µm |
| expansion coefficient |
5.2 x 10-7 / ºC (Quartz) |
10 mm : 5.2 x 10-7 / ºC (Quartz)
50, 100 mm : - 6.5 x 10-7 / ºC (Neoceram) |
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FEATURES
- LED light-diffraction interference
method realize sub-micron resolution
- High precision quartz glass scale.
- Achieved high resolution of 0.8nm,
combined with 1000-fold interpolator.
*1) Comparison measurement with Laser
Interference at 23 ºC |
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