|
|
 |
 |
ML-08/80, ML-16/80
Compact and low cost 80-fold Hybrid IC interpolator included
|
|
ML-08/80 |
ML-16/80 |
| Light source |
LED |
| Maximum Resolution |
20-fold |
0.04 µm |
0.08 µm |
| 40-fold |
0.02 µm |
0.04 µm |
| 80-fold |
0.01 µm |
0.02 µm |
Maximum response
speed |
20-fold |
80 mm / sec. |
160 mm / sec. |
| 40-fold |
160 mm / sec. |
320 mm / sec. |
| 80-fold |
160 mm / sec. |
320 mm / sec. |
A,B phase
incremental |
output signal |
2 phase rectangle wave signal |
| signal type |
Balanced Line Driver |
Z phase
reference |
output signal |
pulse signal at the
right end of scale |
| signal type |
Differential Line Driver |
| pulse width |
100 ± 20 µsec |
| Power supply voltage |
DC + 5.00 V ± 5 % |
| Dimension |
Encoder Head |
16 x 23 x 16 mm |
| Interpolator
Box |
90
x 132 x 36 mm |
Ambient conditions
|
operating temperature |
10 ~ 40 ºC |
| storage temperature |
-
10 ~ 50 ºC |
| humidity |
max.
80 % RH (no condensation) |
| Scale |
grating pitch
(at 23 ºC) |
1.6 µm |
3.2 µm |
| length |
10 mm |
10, 50, 100
mm |
| linearity accuracy
*1 |
10 mm : ±
0.08 µm |
10 mm : ±
0.09 µm
50 mm : ± 0.2 µm
100 mm : ± 0.3 µm |
| expansion coefficient |
5.2 x 10-7
/ ºC (Quartz) |
10 mm : 5.2
x 10-7 / ºC
(Quartz)
50, 100 mm : - 6.5 x 10-7 / ºC
(Neoceram) |
|
FEATURES
- LED light-diffraction interference
method realize sub-micron resolution
- High precision quartz glass scale.
- Achieved high resolution of 0.8nm,
combined with 1000-fold interpolator.
*1) Comparison measurement with Laser
Interference at 23 ºC |
|
|
|
|
|