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DS-80
High-resolution, High-accuracy, High-speed response
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Sensor Head |
A-type
|
B-type
|
C-type |
Measurement
System
|
Michelson interferometer |
Light source
|
Semiconductor Laser (wavelength 650 nm) |
Measuring range
|
± 50 µm |
Working distance
|
10 mm
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2.5 mm
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53 ±
0.5 mm |
Laser spot diameter
|
20
x 10 µm
|
5
x 2.5 µm
|
50
x 25 µm |
Alignment tolerance
|
± 0.5
degrees
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± 2.0
degrees
|
± 0.3
degrees |
Resolution
|
max. 0.08 nm |
Linearity
|
less than ± 0.02 % of full scale |
| Response frequency |
max.
500 kHz (at 0.1 µm p-p or less) |
Object surface
|
Mirror reflection
surface |
Dimensions
|
51 x 38 x 19
mm
|
47 x 38 x 19
mm |
53.1 x 49.5
x 20 mm |
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DSP board unit
| Composition |
Interface Box,
DSP board |
Bus type
|
ISA bus or PCI bus |
| OS |
Windows95,
98, NT4.0, 2000 |
Sensor
input
|
2 ch |
Displacement
output
|
Graphical Display on screen, Data
file
creation (CSV format), Analog voltage output |
| Sampling
speed |
Real Time mode:
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1 ch: 50 kHz
(fixed)
2 ch simultaneous: 25 kHz (fixed) |
| Storage mode: |
1 ch: up to
100 kHz (adjustable)
2 ch simultaneous: up to 50 kHz (adjustable) |
Storage
data size
|
max.
30,000 points |
External
trigger
|
One sample per trigger, TTL level |
Analog
output
|
± 2.5
V |
| Dimensions |
Interface Box
|
120 x 118 x
30 mm |
| DSP board |
203 x 99.1 mm |
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FEATURES
*1) Comparison measurement with Laser
Interference at 23 ºC |
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| micro laser interferometer |
| DS-80 |
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To
download the images
Right click on
Download
Link and Save Target As
to
your local folder. DOWNLOAD
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