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INTRODUCTION
Non-contact displacement
and vibration sensor capable of ultra-high resolution
of 0.08nm with high speed response.
In the world of ultra-precision equipment which demand
movements in units of nanometers, continuous and sccurate
detection of movement status is essential.
The DS - 80 employs the Michelson interference method,
discovered in the Michelson-Morley experiments, to
make highly accurate measurements based on the laser's
wavelength. Canon has realized a Michelson interferometer,
including both the light source and sensor, in a space
of only 47 x 32 x 19 mm using its precision optical
technology.
FEATURES
- In the world of ultra-precision
equipment which demand movements in units of nanometers,
continuous and accurate detection of movement status
is essential.
- The DS-80 employs the Michelson
interference method, discovered in the Michelson-Morley
experiments, to make highly accurate measurements
based on the laser's wavelength.
- Canon has realized a Michelson
interferometer, including both the light source
and sensor, in a space of only 47x32x19mm using
its precision optical tech-nology. Canon has created
two types of sensors - A-type with a working distance
of 10mm and B-type with a working distance of 2.5mm
- to support a wide range of needs.
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| Evaluation of Piezo
actuator |
Precise detection of
stage oscillation |
INSTALLATION CAUTION
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1. |
Start up the
exclusive software of Micro Laser Interferometer
DS-80, then select Head Adjustment mode. |
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2. |
Position the sensor head
toward the measurement object so as to make the
Lissajous pattern as large as possible. |
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3. |
If the sensor head is
detecting an oscillation with an amplitude greater
than 325nm, the Lissajous function will trace
a circle.
If the amplitude is less than 325nm, a complete
circle cannot be drawn. |
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