| Spinstand Series SS-1650 |
| 1. Head positioning |
|
θ stage Canon |
Canon rotary positioner |
Stroke |
±30deg (center is Z phase position) |
Resolution |
0.0039 arc-sec (16 arc-sec / 4096)
1.0nm at R56mm |
| 2. Disk spindle |
|
Bearing method |
Canon Air Bearing spindle motor |
Rotation speed |
3000~10,000rpm |
Pulse |
83,328 Pulse Per Rotation A/B
Phase Signal |
Rotation unevenness |
0.001% or less |
Acceleration, deceleration time |
5 sec or less (0 to 10,000rpm) |
X-stage |
Servo motor and lead screw |
Stroke |
100mm |
Resolution |
0.5µm |
Positioning repeatability |
5µm or less (Vacuum lock) |
Maximum speed |
200mm/sec |
| 3. ENVIRONMENTAL SPECIFICATIONS |
|
Power |
AC90~240V 800VA |
Air supply |
490kpa 6N ℓ/min (Dry Clean Air) |
Operating temperature, humidity |
18~28°C, 30~80% (no condensation) |
Storage temperature, humidity |
0~60°C, 0~85% (no condensation) |
| 4. Others |
|
External dimensions |
Spinstand body: 350 x 540 x 1240mm |
| Composition |
|
Servo writer mechanical |
Rotary positioner |
X-stage |
Air spindle motor |
Servo writer control box |
Rotary positioner control board |
X-Stage control board |
Air spindle driver |
Encoder interface unit |
Pattern generator board |
CPU board |
Option |
Head loader, Fixture |
Head Amp. board |