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Canon ArF scanners have evolved through four generations
of development in all areas of system technology, with emphasis
on platform design fundamentals, imaging/machine performance,
and cost of ownership.
To serve the 100nm node generation, Canon has already introduced
the FPA-5000AS3, an ArF exposure tool equipped with an NA0.75
lens. Having also anticipated the trend now underway in
ArF volume production using very aggressive RET methods,
Canon has developed the FPA-6000AS4, with an ultra-high
NA0.85 lens, on new platform that provides high productivity
to handle critical dimension shrinkage beyond the 90nm node.
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