Canon i-line step-and-repeat systems (steppers) continue to provide the least complicated, most cost effective solution for imaging less critical layers. Used as mix-and-match partners with Canon KrF and ArF scanners, these field-proven steppers help achieve high throughput in a single-stage system footprint.

FPA-3000i5+ STEPPER

Achieves 0.35µmresolution and 100-wph throughput of 8-in. wafers. Field size is 22mm x 22mm. Integrates with other FPA-3000 tools such as the FPA-3000EX6 KrF stepper for optimum mix and match lithography.

FPA-3000iW STEPPER

Large (nominal 50mm) field size. Achieves 0.80µm resolution and 115-wph throughput of 8-in. wafers. It is a compact but prolific stepper for rough layer production.

FPA-5500iX STEPPER

Recommended for CCDs and LCDs as well as IC rough layers in 200mm or 300mm production. New 2:1 lens design. Exposes 50mm x 50mm area in a single shot.

FPA-5500iZ STEPPER

The FPA-5500IZ has a lot in common with Canon's newest scanners—namely, 300mm capability, wide-field size (26mm x 33mm), high-speed wafer stage and enhanced vibration control technology. For use in middle or rough layer production in the 0.13µm generation and below.