The Canon USA Semiconductor Equipment Division, San Jose,
Calif., supplies step-and-repeat and step-and-scan photolithography
tools manufactured by the Semiconductor Production Equipment
Group of Canon Inc. This group has been contributing significantly
to Canon’s overall corporate growth for three decades.
Since the 1970's, the division has had a strong presence
in the United States, where it is responsible for marketing
and sales, customer process development, technical support,
training and administrative operations. Its customers
are manufacturers of integrated circuit (IC) devices,
thin film heads for data storage drives, and microelectromechanical
devices (MEMS).
Semiconductor chipmakers use ultraprecision Canon lithography
tools to align and focus a high intensity beam of light
that passes through a master pattern of the chip's circuitry
and exposes small areas of a silicon wafer, each of which
will eventually become an individual chip. The positioning,
focusing and exposure steps occur at very high speed and
within dimensions of only a few ten-millionths of an inch.
Photolithography is a key enabling technology in IC production,
so Canon seeks to be the preferred partner for its customers
by providing compelling leading edge technology, products
and solutions. This requires not only close support at
customer sites, but also substantial ongoing investment
in R&D, and close collaboration with other suppliers
of IC design and processing equipment, materials and services.