Introduction

This five-day course is designed to provide the students with an introduction to the hardware of the stage and focus system of FPA-3000 Series steppers. The primary goal of this course is to provide the students with the basic knowledge of trouble analysis of these sub-components.

• Performance Objectives·

• Perform Air Bearing Stage Trouble Analysis

• Perform OPTF Unit Trouble Analysis

• Perform Theta-Z Tilt Unit Trouble Analysis
  

Prerequisites

FPA 3000 i4 Operations CD ROM course and F3006 or Operations Course (No Longer Available)2003

Course Schedule 1/27/2003, 3/10/2003, 04/14/2003, 6/09/2003 7/14/2003 10/13/2003

Email Contact - semi-registry@cusa.canon.com