Introduction

This eight-day course introduces the student to repair, maintenance, and adjustment procedures for the Wafer Feeder/Reticle Changer and Illuminator System. Troubleshooting the degredation issues in the Illuminator System is also covered, for FPA 3000 series steppers.

Performance Objectives

• Performance Objectives

• Functions of the Illuminator Components

• Adjust Lamp Position

• Adjust IUC Detector Position

• Adjust Second Zoom Lens Position

• Identify Source of Uniformity Degradation Problem

• Perform Reticle Feeder Position Adjustments

• Perform Wafer Unit Interference Checks

• Operate Reticle Feeder and water feed with Manual Operation Commands
  

Prerequisites

FPA 3000 i4 Operations CD ROM course or Operations Course (No Longer Available)
F3006 (Preventive Maintenance I) 2003

Course Schedule 02/03/2003 3/17/2003 4/21/2003
10/20/2003

Email Contact - semi-registry@cusa.canon.com