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| Introduction
This five-day course provides the basic conceptual groundwork
for all subsequent training. This course introduces and
describes the major subsystems, subassembly interconnections,
safety issues, and job execution. |
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Performance Objectives
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Introduction, Safety, Scanning Exposure Information
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Reticle Loading, Wafer Cassette Loading, Scanner Operations§
Unit Description
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Wafer Feeding Systems
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Illumination System
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Alignment System§ Chamber CD-120
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Mount System
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Real Time Control System
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420 Test Reticle Information
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Basic Commands and Scanner Parameters
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Prerequisites
ES2/ES3 Scanner Operations CD-ROM or F5000 ES2/ES3 Basic
Fundamentals Class.2003 Course Schedule
Course Start Date: 01/27/2003, 4/14/2003, 8/11/2003, 10/20/2003
Email Contact - semi-registry@cusa.canon.com
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