Introduction

This five-day course covers Safety, Uniformity Check, Intensity Check, Laser Axis Adjustment, SERC Command, IL Command, IUC Command, Stepping Accuracy and Repeatability, SKEW, Reticle Scan Stage Calibration, Best Focus, AGA Exposure Offset. Excimer Laser gas information and Status Check.

Performance Objectives

• Scanner Introduction

• Illumination Optimization

• Laser Axis Adjustment

• IL Commands§ IUC Command

• Stepping Accuracy and Repeatability

• SKEW

• Reticle Scan Stage Calibration

• Best Focus

• AGA Exposure Offset

• Excimer Laser Gas Information and Status Check
  

Prerequisites

ES2/ES3 Scanner Operations CD-ROM or F5000 ES2/ES3 Basic Fundamentals Class2003 Course Schedule

Course Start Date: 01/27/2003, 4/14/2003, 8/11/2003, 10/20/2003

Email Contact - semi-registry@cusa.canon.com