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Products
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Canon microlithography tools, called steppers and scanners, are used primarily in the process of making integrated circuit (IC) devices. In chip making, a stepper or scanner projects hundreds of identical images, patterns of a circuit layer from a photomask, one at a time, across the entire surface of a silicon wafer, which is then "developed," etched, cleaned, doped, metallized and polished. This process will be repeated as many times on additional layers until the ICs are completely formed. Typically, the number and complexity of features on each layer varies, so every IC device and process requires an integrated suite of imaging tools to achieve the most cost-effective volume production. Canon has steppers and scanners for use at every technology node from very rough layers requiring only 0.80µm resolution, to critical layers requiring 80nm. These tools handle wafer sizes up to 300mm diameter. |
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ArF (193nm wavelength)
Canon ArF scanners offer ultra-high optical and electromechanical precision and predictive metrology for high volume production of chip layers with features as small as 80nm.
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KrF (248nm wavelength)
Canon KrF steppers and scanners are still the core tools of IC production as a result of enhanced lens capabilities and corresponding mechanical advancements that support sub-wavelength techniques.
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i-Line (365nm wavelength)
Canon i-line steppers provide a cost-effective solution for imaging the less critical layers within an IC device.
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Flat Panel Imaging
This category of Canon microlithography tools serves the rapidly growing demand for active matrix liquid crystal flat panel displays, with uses ranging from cell phones to large flat screen video panels.
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