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Canon provides nanoimprint lithography manufacturing equipment to Toshiba Memory's Yokkaichi Operations plant


TOKYO, July 27, 2017 – Canon Inc. announced today that the company has provided the FPA-1200NZ2C, semiconductor lithography equipment that utilizes nanoimprint lithography (NIL) technology which Canon has been continuously developing since 2004. http://global.canon/en/news/2017/20170720.html.