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Litho Products

Welcome to the homepage for the Industrial Products Division of Canon USA.

Please visit this site often for updated information and news about products, technologies, and services offered by Canon. 

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Litho Products

Based in San Jose, California, the Canon USA Industrial Products Division supplies i-line and Deep UV (DUV) lithography systems that are used in the fabrication and packaging of high-tech devices including integrated circuits, hard disk read/write heads, Microelectromechanical Systems (MEMS) devices, image sensors, displays, power devices and LEDs. 

Canon photolithography equipment has also been developed to support the demands of Advanced Packaging, Through-Silicon Vias (TSV), Silicon Interposer and 3D Integration applications. 

Canon has the resources and the commitment to develop ultra-precision imaging technologies and to find smarter ways to apply them to achieve the highest performance and value. 
This smarter thinking is Enlightened Lithography–the unique Canon value that ensures the best return on our customers' investment. 

For support, service and product inquiries, please contact semi-info@cusa.canon.com.

FPA 3030i5 plus litho stepper

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Industrial News

Download the latest Industrial News newsletter to learn more about what is new in the industries of Litho, Motion Control, Optoelectronic, etc.

Contact Us

Find contact information for specific departments for support, service, and product inquiries.

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