Based in San Jose, California, the Canon USA Industrial Products Division supplies i-line and Deep UV (DUV) lithography systems that are used in the fabrication and packaging of high-tech devices including integrated circuits, hard disk read/write heads, Microelectromechanical Systems (MEMS) devices, image sensors, displays, power devices and LEDs.
Canon photolithography equipment has also been developed to support the demands of Advanced Packaging, Through-Silicon Vias (TSV), Silicon Interposer and 3D Integration applications.
Canon has the resources and the commitment to develop ultra-precision imaging technologies and to find smarter ways to apply them to achieve the highest performance and value.
This smarter thinking is Enlightened Lithography–the unique Canon value that ensures the best return on our customers' investment.
Canon i-line (365 nm wavelength) and DUV (248 nm wavelength) steppers are designed to provide cost-effective imaging for applications requiring flexible substrate handling and resolution as low as 150 nm.
Responding to the demands of the market, Canon USA continues to offer Certified Product Optimization (CPO) Program benefits to customers seeking an all-inclusive used equipment solution. The CPO Program provides the best performance, reliability, value and support for legacy Canon photolithography equipment.