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FPA-6300ESW

DUV Scanners

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Features

FPA-6300ESW is equipped with a wide-field lens.

  • By changing the projection magnification (4:1 → 3.125:1), Canon realized a wider exposure field with the reticle size remaining at 6 inches.

  • FPA-6300ESW is the only KrF scanner in the world that can expose full size CMOS image sensor without stitching1 because 33 mm x 42.2 mm can be exposed in one shot.

FPA-6300ESW is a derivation of the proven FPA-6300ES6a platform.

  • FPA-6300ES6a scanners are already popular in the market.

  • FPA-6300ESW scanners adopt technology developed to support front-end-of-the-line semiconductor manufacturing processes and can realize the same uptime and reliability as FPA-6300ES6a scanners.

  • FPA-6300ESW features a scalable platform offering field upgrade plans to improve productivity and overlay accuracy.

1 Stitching exposure: A method of increasing exposure field size by connecting two or more adjacent exposure regions. The positional accuracy and alignment of the adjacent exposure regions directly affects the yield.

This is to make Misc appear on the page when needed.

Specifications

Model Type

KrF (248 nm) DUV Scanner

Wafer Size

300 mm

Resolution

≤ 130 nm

Numerical Aperture (NA)

0.45 ~ 0.70

Reticle Size

6 in. (0.25 in. thick)

Reduction Ratio

3.125:1

Field Size

33 mm x 42.2 mm

Overlay Accuracy

≤ 9 nm (|m| + 3 )

Footprint (W x D x H)

2,300 mm × 5,155 mm × 2,900 mm

Options

AFIS Illumination System
Pellicle Particle Checker
SMIF OHT Compatible
PC Remote Console
Online Functions (GEM2)

† Prices and specifications subject to change without notice. Actual prices are determined by individual dealers and may vary.

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