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FPA-3030i5+ imaging system provides 0.35µm resolution with a flexible optical system and lens
FPA-3030i5+ platform enhancements help provide alignment accuracy and reliability
FPA-3030i5+ platform supports optional equipment designed to process special environmentally-conscious device substrates
FPA-3030i5+ platform electrical control system and software are modernized to help support future semiconductor manufacturing
Numerical Aperture (NA)
≥120 wph (150 mm)
† Prices and specifications subject to change without notice. Actual prices are determined by individual dealers and may vary.