Web Content Viewer


FPA-3030EX6 Stepper


Nanoimprint Lithography

Learn more about the technology behind Canon Lithography Tools.

Glowing Earth on dark background

For more information, click to download the Product Catalog.

FPA 6000es6a DUV Scanner

Canon Certified Product Optimization (CPO) Program

For inquiries, please contact us.

Contact Us


FPA-3030EX6 is compatible with a variety of special substrates

  • FPA-3030EX6 steppers accommodates small-sized substrates with diameters of 200 mm or less

  • FPA-3030EX6 steppers are capable of handling a variety of substrate thicknesses and materials including silicon, sapphire, silicon carbide and glass

  • FPA-3030EX6 steppers share the same wafer feeding system as the FPA-3030i5+ i-line stepper (released in June 2012) that has built a proven track record handling special and small-sized substrates

FPA-3030EX6 is a high performance KrF excimer laser stepper

  • FPA-3030EX6 steppers deliver the highest levels of resolution, overlay accuracy and productivity (throughput) among KrF excimer laser steppers in the same class*

  • FPA-3030EX6 steppers provide 150 nm imaging resolution, 25 nm overlay accuracy and 121 wafers per hour throughput**

FPA-3030EX6 IS compatible with FPA-3000EX6 reticle and recipes

  • FPA-3030EX6 steppers can use the same reticles as the FPA-3000EX6, making possible the effective utilization of existing equipment and assets

  • FPA-3000EX6 stepper recipe files can be imported and applied to the new FPA-3030EX6 steppers, easing process development challenges

* As of July 4, 2016, based on a Canon survey

** 200mm wafer, 60 shots

This is to make Misc appear on the page when needed.


Model Type

KrF (248 nm) DUV Stepper

Wafer Size

200 mm; 150 mm; 125 mm; 100 mm


≤ 150 nm

Reticle Size

6 in. (0.25 in. thick)

Reduction Ratio


Field Size

22 mm x 22 mm

Overlay Accuracy

≤25 nm (|m| + 3σ)

† Prices and specifications subject to change without notice. Actual prices are determined by individual dealers and may vary.

 Return to Top