CANON U.S.A.,Inc. MAKES NO GUARANTEES OF ANY KIND WITH REGARD TO ANY PROGRAMS, FILES, DRIVERS OR ANY OTHER MATERIALS CONTAINED ON OR DOWNLOADED FROM THIS, OR ANY OTHER, CANON SOFTWARE SITE. ALL SUCH PROGRAMS, FILES, DRIVERS AND OTHER MATERIALS ARE SUPPLIED "AS IS." CANON DISCLAIMS ALL WARRANTIES, EXPRESS OR IMPLIED, INCLUDING, WITHOUT LIMITATION, IMPLIED WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NON-INFRINGEMENT.
CANON U.S.A.,Inc. SHALL NOT BE HELD LIABLE FOR ERRORS CONTAINED HEREIN, OR FOR LOST PROFITS, LOST OPPORTUNITIES, CONSEQUENTIAL OR INCIDENTAL DAMAGES INCURRED AS A RESULT OF ACTING ON INFORMATION, OR THE OPERATION OF ANY SOFTWARE, INCLUDED IN THIS SOFTWARE SITE.
I have read and understand the information above, and wish to download the designated software.
FPA-3030EX6 is compatible with a variety of special substrates
FPA-3030EX6 steppers accommodates small-sized substrates with diameters of 200 mm or less
FPA-3030EX6 steppers are capable of handling a variety of substrate thicknesses and materials including silicon, sapphire, silicon carbide and glass
FPA-3030EX6 steppers share the same wafer feeding system as the FPA-3030i5+ i-line stepper (released in June 2012) that has built a proven track record handling special and small-sized substrates
FPA-3030EX6 is a high performance KrF excimer laser stepper
FPA-3030EX6 steppers deliver the highest levels of resolution, overlay accuracy and productivity (throughput) among KrF excimer laser steppers in the same class*
FPA-3030EX6 steppers provide 150 nm imaging resolution, 25 nm overlay accuracy and 121 wafers per hour throughput**
FPA-3030EX6 IS compatible with FPA-3000EX6 reticle and recipes
FPA-3030EX6 steppers can use the same reticles as the FPA-3000EX6, making possible the effective utilization of existing equipment and assets
FPA-3000EX6 stepper recipe files can be imported and applied to the new FPA-3030EX6 steppers, easing process development challenges
* As of July 4, 2016, based on a Canon survey
** 200mm wafer, 60 shots
† Prices and specifications subject to change without notice. Actual prices are determined by individual dealers and may vary.