Web Content Viewer


FPA-3030i5a Stepper


Glowing Earth on dark background

For more information, click to download the Product Catalog.

FPA 6000es6a DUV Scanner

Canon Certified Product Optimization (CPO) Program

For inquiries, please contact us.

Contact Us


FPA-3030i5a supports ≤ 200 mm diameter substrates
  • Wafer sizes from 50 mm (2 inch) to 200 mm (8 inch) diameter are supported
  • Designed to enable processing of transparent and compound semiconductor wafer materials including sapphire, silicon carbide (SiC) and gallium nitride (GaN)
  • FPA-3030i5a stepper multi-wafer handling options support automated processing of 2 wafer sizes
FPA-3030i5a adopts a flexible off-axis alignment scope
  • Off-axis alignment scope optical path does not pass through the projection lens
  • Off-axis alignment allows the use of a wide range of alignment illumination wavelengths to measure alignment marks. Illumination wave length band can be optimized according to wafer conditions
  • FPA-3030i5a alignment system enables alignment measurement using Dark-Field field illumination to enhance process robustness
  • Infrared TSA (Through Silicon Alignment) is available as an option to support backside alignment processes
Newly redesigned hardware and software can reduce Cost-of-Ownership
  • FPA-3030i5a productivity enhancements include software upgrades, adoption of a new alignment scope that shortens alignment mark measurement time and a faster wafer transfer system
  • Productivity is improved approximately 17% (200 mm wafers) compared to the predecessor FPA-3030i5+ stepper
  • New chamber temperature control system can reduce power consumption approximately 20% compared to the FPA-3030i5+

This is to make Misc appear on the page when needed.


Model Type

i-Line (365 nm) Stepper

Wafer Size

50 mm, 75 mm, 100 mm, 150 mm, 200 mm


≤0.35 µm

Numerical Aperture (NA)

0.45 ~ 0.63

Reticle Size

6 in. (0.25 in. thick); optional 5 in.

Reduction Ratio


Field Size

22 mm x 22 mm

Overlay Accuracy

≤40 nm (|m| + 3σ)

† Prices and specifications subject to change without notice. Actual prices are determined by individual dealers and may vary.

 Return to Top