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FeaturesFPA-5550iZ2 provides high productivity and overlay accuracy.
FPA-5550iZ2 steppers reduce wafer processing time by optimizing the alignment, exposure and wafer transfer sequences.
FPA-5550iZ2 steppers shorten lot replacement time and speed up measurement and calibration processing to enable high productivity.
FPA-5550iZ2 steppers are equipped with a Shot Shape Compensator (SSC Unit) to enable shot shape correction of vertical and horizontal magnification differences and skew (shot distortion in diagonal orientation) within each exposure field.
Shot Shape Compensator employs original Canon technology in the projection optical system that allows improved matching to underlying layers and improved overlay accuracy.
Productivity improvement and Overlay Improvement options to balance throughput and overlay accuracy are available.
Color filter and other alignment system options established for earlier FPA-5550iZ steppers allow stable operation and flexibility for a variety of processes.
Numerical Aperture (NA)
MMO1 ≤ 20 nm (|m| + 3σ)
Footprint (W x D x H)
Productivity Improvement Option
Non-linear Overlay Compensation (EAGA-FL)
Low Oxygen Exposure (LOX)
Pellicle Particle Checker
Resist Outgassing Unit
PC Remote Console
Online Functions (GEM)
† Prices and specifications subject to change without notice. Actual prices are determined by individual dealers and may vary.