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  1. EC7400 Electronic Component Production PVD Equipment

    Product Highlights

    • Equipped with cassette chamber and transfer chamber (C to C specification)
    • Delivers excellent deposition uniformity
    • Able to accommodate a variety of process modules according to application
    As low as $0.00
  2. EL3000 LED Production PVD Equipment

    Product Highlights

    • Batch processing of multiple wafers by tray transport is possible due to rotary deposition, which provides good deposition uniformity over a large area
    • Fully automated operation (pumping, wafer transfer and deposition process)
    • Provides high target utilization with rotary magnetron cathode
    As low as $0.00
  3. FC7100 Metal Gate PVD Equipment

    Product Highlights

    • Capable of film composition control through ultrahigh vacuum co-sputtering
    • Precise control of film thickness at sub-nanometer level
    • Excellent uniformity (1σ < 1%).
    As low as $0.00
  4. HC7100 HDD Sensor PVD Equipment

    Product Highlights

    • Offers excellent film thickness distribution of ±1 % or less with the use of LRP (Low Pressure Remote Plasma) sputtering technology
    • Provides very flat and low resistance films with low pressure discharge at 0.02 Pa, which is an order of magnitude lower than conventional sputtering pressure
    • Provides high MR ratio
    As low as $0.00
  5. IC7500 Memory Wire PVD Equipment

    Product Highlights

    • Variable cathode magnet position (in 3D) using recipe, enabling easy optimization of film uniformity and target cleaning
    • Provides world's highest standard throughput (80 wafers/hour) 
    • Provides > 90 % uptime in semiconductor memory production line
    As low as $0.00
  6. ML3000 HDD Media PVD Equipment

    Product Highlights

    • Provides approximately twice the productivity (up to 1800 disks/hour) compared to competitive equipment
    • Over ten days of continuous operation 
    • Flexible configuration enabling addition of chambers according to process needs
    As low as $0.00
  7. NC7900 MRAM PVD Equipment

    Product Highlights

    • Ultra high vacuum and oblique sputtering technology
    • Excellent interfaces within the MTJ stack
    • Compatible with planar & perpendicular MTJ deposition
    As low as $0.00
If you have a MyCanon Account, your product and CarePAK will be registered using the profile details you provided. For Kit products, you must complete the registration process directly in your account.
If you have a MyCanon Account, your product and CarePAK will be registered using the profile details you provided. For Kit products, you must complete the registration process directly in your account.