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  1. EC7400 Electronic Component Production PVD Equipment

    Product Highlights

    • Equipped with cassette chamber and transfer chamber (C to C specification)
    • Delivers excellent deposition uniformity
    • Able to accommodate a variety of process modules according to application
    $0.00
    Out Of Stock
  2. EL3000 LED Production PVD Equipment

    Product Highlights

    • Batch processing of multiple wafers by tray transport is possible due to rotary deposition, which provides good deposition uniformity over a large area
    • Fully automated operation (pumping, wafer transfer and deposition process)
    • Provides high target utilization with rotary magnetron cathode
    $0.00
    Out Of Stock
  3. FC7100 Metal Gate PVD Equipment

    Product Highlights

    • Capable of film composition control through ultrahigh vacuum co-sputtering
    • Precise control of film thickness at sub-nanometer level
    • Excellent uniformity (1σ < 1%).
    $0.00
    Out Of Stock
  4. HC7100 HDD Sensor PVD Equipment

    Product Highlights

    • Offers excellent film thickness distribution of ±1 % or less with the use of LRP (Low Pressure Remote Plasma) sputtering technology
    • Provides very flat and low resistance films with low pressure discharge at 0.02 Pa, which is an order of magnitude lower than conventional sputtering pressure
    • Provides high MR ratio
    $0.00
    Out Of Stock
  5. IC7500 Memory Wire PVD Equipment

    Product Highlights

    • Variable cathode magnet position (in 3D) using recipe, enabling easy optimization of film uniformity and target cleaning
    • Provides world's highest standard throughput (80 wafers/hour) 
    • Provides > 90 % uptime in semiconductor memory production line
    $0.00
    Out Of Stock
  6. ML3000 HDD Media PVD Equipment

    Product Highlights

    • Provides approximately twice the productivity (up to 1800 disks/hour) compared to competitive equipment
    • Over ten days of continuous operation 
    • Flexible configuration enabling addition of chambers according to process needs
    $0.00
    Out Of Stock
  7. NC7900 MRAM PVD Equipment

    Product Highlights

    • Ultra high vacuum and oblique sputtering technology
    • Excellent interfaces within the MTJ stack
    • Compatible with planar & perpendicular MTJ deposition
    $0.00
    Out Of Stock