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NC8000 MRAM Etching Equipment
Product Highlights
Product HighlightsFeatures
- Large diameter IBE grid provides very good uniformity and high productivity
- Clampless holder with 2 axes of rotation and tilt
- Optical end point detection system (OES) for etch depth control
Applications
- MRAM mass production
- Large diameter IBE grid provides very good uniformity and high productivity
- Clampless holder with 2 axes of rotation and tilt
- Optical end point detection system (OES) for etch depth control
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