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Front-end i-Line Steppers

  1. Product

    FPA-3030i6 Stepper

    Product Highlights

    As low as $0.00

    FPA-3030i6 [30i6] Steppers feature new high-transmittance optics that are designed to reduce lens aberrations and improve exposure intensity. The standard throughput for the 30i6 is 130 wafers per hour and the stepper features numerical aperture options that allow exposure condition optimization according to process requirements.

  2. Product

    FPA-5550iX Stepper

    Product Highlights

    As low as $0.00
    FPA-5550iX steppers provide large-field device imaging without stitching adjacent fields
    FPA-5550iX steppers adopt a high-NA, 1/2 reduction projection lens to deliver 0.5 um resolution across a large 50 mm x 50 mm exposure field. The FPA-5550iX is suitable for production of full-field image sensors and advanced augmented reality displays that are larger field than Front-End-Of-the-Line (FEOL) lithography exposure fields (26mm x 33mm) and FPA-5550iX steppers can help avoid pattern stitching of adjacent fields that can directly affect yield.
  3. Product

    FPA-5550iZ2 Stepper

    Product Highlights

    As low as $0.00

    High-Productivity and High-Overlay Accuracy i-line Stepper for Low-CoO Fabrication

    FPA-5550iZ2 i-line Steppers offer a low cost Mix-&-Match lithography solution for advanced Logic, Memory and CMOS Image Sensor (CIS) fabrication. FPA-5550iZ2 Steppers also support growing demand for Internet-of-Things (IoT) device fabrication on both 200 and 300 mm wafers.

    The FPA-5550iZ2 offers a balance between productivity and alignment accuracy. Throughput upgrades include calibration, alignment, exposure & wafer transfer sequence optimization, and reduced wafer lot exchange times. Overlay matching can also be improved through shot-specific intra-field compensation.

  4. Product

    FPA-3030iWa Stepper

    Product Highlights

    As low as $0.00

    FPA-3030iWa steppers support small substrate processes using wafers 200 mm or less in diameter that are commonly used for fabricating devices related to 5G communication, power electronics and Internet-of-Things (IoT) devices including MEMS and CMOS Image sensors.

 
If you have a MyCanon Account, your product and CarePAK will be registered using the profile details you provided. For Kit products, you must complete the registration process directly in your account.
If you have a MyCanon Account, your product and CarePAK will be registered using the profile details you provided. For Kit products, you must complete the registration process directly in your account.