My Cart
Filter Sort
View as Grid List
4 Products
per page
Filter Sort
Sort By
  1. FPA-3030i5a Stepper

    Product Highlights

    FPA-3030i5a i-line Steppers provide low Cost-of-Ownership manufacturing for small substrates and are capable of imaging resolution below 0.35 microns while maintaining 40 nm overlay accuracy and high productivity. Canon developed the FPA-3030i5a to provide stable imaging, overlay and productivity for RF, Photonics, Sensor, Power, 5G Communication and MEMS applications.

    As low as $0.00
  2. FPA-3030iWa Stepper

    Product Highlights

    FPA-3030iWa steppers support small substrate processes using wafers 200 mm or less in diameter that are commonly used for fabricating devices related to 5G communication, power electronics and Internet-of-Things (IoT) devices including MEMS and CMOS Image sensors.

    As low as $0.00
  3. FPA-5550iZ2 Stepper

    Product Highlights

    High-Productivity and High-Overlay Accuracy i-line Stepper for Low-CoO Fabrication

    FPA-5550iZ2 i-line Steppers offer a low cost Mix-&-Match lithography solution for advanced Logic, Memory and CMOS Image Sensor (CIS) fabrication. FPA-5550iZ2 Steppers also support growing demand for Internet-of-Things (IoT) device fabrication on both 200 and 300 mm wafers.

    The FPA-5550iZ2 offers a balance between productivity and alignment accuracy. Throughput upgrades include calibration, alignment, exposure & wafer transfer sequence optimization, and reduced wafer lot exchange times. Overlay matching can also be improved through shot-specific intra-field compensation.

    As low as $0.00
  4. FPA-5550iX Stepper

    Product Highlights

    FPA-5550iX steppers provide large-field device imaging without stitching adjacent fields
    FPA-5550iX steppers adopt a high-NA, 1/2 reduction projection lens to deliver 0.5 um resolution across a large 50 mm x 50 mm exposure field. The FPA-5550iX is suitable for production of full-field image sensors and advanced augmented reality displays that are larger field than Front-End-Of-the-Line (FEOL) lithography exposure fields (26mm x 33mm) and FPA-5550iX steppers can help avoid pattern stitching of adjacent fields that can directly affect yield.
    As low as $0.00
If you have a MyCanon Account, your product and CarePAK will be registered using the profile details you provided. For Kits and Refurbished products, you must complete the registration process directly in your account.
If you have a MyCanon Account, your product and CarePAK will be registered using the profile details you provided. For Kits and Refurbished products, you must complete the registration process directly in your account.