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  1. FPA-3030EX6 Stepper

    Product Highlights

    FPA-3030EX6 KrF excimer laser steppers are designed for to support fabrication of analog chips, sensors and communication devices for IoT, high-bandwidth communication and power devices. The FPA-3030EX6 inherits the functionality of its predecessor, the FPA-3000EX6 (released in September 1999), while also offering compatibility with special substrates and functions used in the fabrication of a multitude of devices.

    $999,999.00
    Out Of Stock
  2. FPA-6300ES6a

    Product Highlights

    The FPA-6300ES6a KrF single-stage lithography system is designed for the mass production of Dynamic Random Access Memory (DRAM), flash and other memory devices; logic devices such as microprocessors for personal computers; color filters and other imaging sensors and image-processing devices.

     

    Based on technologies cultivated through the field-proven FPA-6000 series, Canon's FPA-6300ES6a DUV scanner achieves high throughput and high overlay accuracy to effectively respond to the advanced needs of chip manufacturers seeking reduced cost of ownership.

    $0.00
    Out Of Stock
  3. FPA-6300ESW

    Product Highlights

    FPA-6300ESW wide-field DUV Scanners are capable of 130 nm resolution across a large exposure area for Single-Exposure Large Device Fabrication.

    FPA-6300ESW Scanners adopt a unique 3.125X reduction projection lens to yield a large 33 x 42.2 mm field size for large device fabrication without stitching.  Originally designed to support CMOS Image Sensor and color filter production on 300 mm wafers, the ESW can be configured to support 300 mm wafer processes including Sensor, Advanced Packaging and Display manufacturing.

    $0.00
    Out Of Stock