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  1. HELEN Series Leak Detectors

    Product Highlights

    • Simple operation
    • Industry leading sensitivity, stability, and response
    • Portable
    As low as $0.00
  2. Quadrupole Mass Spectrometers

    Product Highlights

    • Seamless measurement from process pressure (1.3 Pa) to ultrahigh vacuum
    • Detecting H2 with high sensitivity in deposition process
    • Long maintenance cycle and low running cost
    As low as $0.00
  3. Vacuum Gauges

    Product Highlights

    • High precision, stable pressure measurement
    • Compact (W46 mm × H49 mm × L70 mm) and lightweight (200 gm)*1
    • Low power consumption (0.5 W)
    As low as $0.00
  4. Vacuum Pumps

    Product Highlights

    Canon ANELVA provides a variety of pumps, including world's highest energy efficient cryopumps, for low vacuum to ultra-high vacuum applications.
    As low as $0.00
If you have a MyCanon Account, your product and CarePAK will be registered using the profile details you provided. For Kits and Refurbished products, you must complete the registration process directly in your account.
If you have a MyCanon Account, your product and CarePAK will be registered using the profile details you provided. For Kits and Refurbished products, you must complete the registration process directly in your account.