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- Simple operation
- Industry leading sensitivity, stability, and response
- Portable
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- Seamless measurement from process pressure (1.3 Pa) to ultrahigh vacuum
- Detecting H2 with high sensitivity in deposition process
- Long maintenance cycle and low running cost
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- High precision, stable pressure measurement
- Compact (W46 mm × H49 mm × L70 mm) and lightweight (200 gm)*1
- Low power consumption (0.5 W)
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Canon ANELVA provides a variety of pumps, including world's highest energy efficient cryopumps, for low vacuum to ultra-high vacuum applications.
