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  1. EL3000 LED Production PVD Equipment

    Product Highlights

    • Batch processing of multiple wafers by tray transport is possible due to rotary deposition, which provides good deposition uniformity over a large area
    • Fully automated operation (pumping, wafer transfer and deposition process)
    • Provides high target utilization with rotary magnetron cathode
    As low as $0.00
  2. FC7100 Metal Gate PVD Equipment

    Product Highlights

    • Capable of film composition control through ultrahigh vacuum co-sputtering
    • Precise control of film thickness at sub-nanometer level
    • Excellent uniformity (1σ < 1%).
    As low as $0.00
  3. HC7100 HDD Sensor PVD Equipment

    Product Highlights

    • Offers excellent film thickness distribution of ±1 % or less with the use of LRP (Low Pressure Remote Plasma) sputtering technology
    • Provides very flat and low resistance films with low pressure discharge at 0.02 Pa, which is an order of magnitude lower than conventional sputtering pressure
    • Provides high MR ratio
    As low as $0.00
  4. HELEN Series Leak Detectors

    Product Highlights

    • Simple operation
    • Industry leading sensitivity, stability, and response
    • Portable
    As low as $0.00
  5. IC7500 Memory Wire PVD Equipment

    Product Highlights

    • Variable cathode magnet position (in 3D) using recipe, enabling easy optimization of film uniformity and target cleaning
    • Provides world's highest standard throughput (80 wafers/hour) 
    • Provides > 90 % uptime in semiconductor memory production line
    As low as $0.00
  6. Quadrupole Mass Spectrometers

    Product Highlights

    • Seamless measurement from process pressure (1.3 Pa) to ultrahigh vacuum
    • Detecting H2 with high sensitivity in deposition process
    • Long maintenance cycle and low running cost
    As low as $0.00
  7. Vacuum Gauges

    Product Highlights

    • High precision, stable pressure measurement
    • Compact (W46 mm × H49 mm × L70 mm) and lightweight (200 gm)*1
    • Low power consumption (0.5 W)
    As low as $0.00
  8. ML3000 HDD Media PVD Equipment

    Product Highlights

    • Provides approximately twice the productivity (up to 1800 disks/hour) compared to competitive equipment
    • Over ten days of continuous operation 
    • Flexible configuration enabling addition of chambers according to process needs
    As low as $0.00
  9. NC7900 MRAM PVD Equipment

    Product Highlights

    • Ultra high vacuum and oblique sputtering technology
    • Excellent interfaces within the MTJ stack
    • Compatible with planar & perpendicular MTJ deposition
    As low as $0.00
  10. NC8000 MRAM Etching Equipment

    Product Highlights

    • Large diameter IBE grid provides very good uniformity and high productivity 
    • Clampless holder with 2 axes of rotation and tilt
    • Optical end point detection system (OES) for etch depth control 
    As low as $0.00
  11. Vacuum Pumps

    Product Highlights

    Canon ANELVA provides a variety of pumps, including world's highest energy efficient cryopumps, for low vacuum to ultra-high vacuum applications.
    As low as $0.00
  12. FPA-1200NZ2C Nanoimprint Stepper

    Product Highlights

    FPA-1200NZ2C nanoimprint steppers can provide ≤ 15 nanometer pattern resolution
    FPA-1200NZ2C systems utilize high-resolution imprint masks that can faithfully reproduce fine circuit patterns on the wafer. Nanoimprint Lithography (NIL) equipment forms patterns on wafers by pressing a mask containing circuit patterns into resist in an imprint process. FPA-1200NZ2C nanoimprint lithography systems support ≤ 15 nanometer processes and can offer benefits over traditional photolithography equipment that can be susceptible to optical distortion.
    As low as $0.00
If you have a MyCanon Account, your product and CarePAK will be registered using the profile details you provided. For Kit products, you must complete the registration process directly in your account.
If you have a MyCanon Account, your product and CarePAK will be registered using the profile details you provided. For Kit products, you must complete the registration process directly in your account.