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FPA-5550iX Stepper

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FPA-5550iX steppers provide large-field device imaging without stitching adjacent fields
FPA-5550iX steppers adopt a high-NA, 1/2 reduction projection lens to deliver 0.5 um resolution across a large 50 mm x 50 mm exposure field. The FPA-5550iX is suitable for production of full-field image sensors and advanced augmented reality displays that are larger field than Front-End-Of-the-Line (FEOL) lithography exposure fields (26mm x 33mm) and FPA-5550iX steppers can help avoid pattern stitching of adjacent fields that can directly affect yield.

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Main Unit Specs