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FPA-3030i6 Stepper

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FPA-3030i6 [30i6] Steppers feature new high-transmittance optics that are designed to reduce lens aberrations and improve exposure intensity. The standard throughput for the 30i6 is 130 wafers per hour and the stepper features numerical aperture options that allow exposure condition optimization according to process requirements.

Technical Specifications

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Main Unit Specs