FPA-6300ESW wide-field DUV Scanners are capable of 130 nm resolution across a large exposure area for Single-Exposure Large Device Fabrication.
FPA-6300ESW Scanners adopt a unique 3.125X reduction projection lens to yield a large 33 x 42.2 mm field size for large device fabrication without stitching. Originally designed to support CMOS Image Sensor and color filter production on 300 mm wafers, the ESW can be configured to support 300 mm wafer processes including Sensor, Advanced Packaging and Display manufacturing.
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WE DISCLAIM ALL WARRANTIES, EXPRESS OR IMPLIED, CONCERNING THE SERVICE INCLUDING THE IMPLIED WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NON-INFRINGEMENT. WITHOUT LIMITING THE PRECEDING SENTENCE, UNLESS OTHERWISE REQUIRED BY APPLICABLE LAW, IN NO EVENT WILL OUR, OR OUR LICENSORS’, AGGREGATE LIABILITY UNDER THESE TERMS WITH RESPECT TO ANY CLAIM EXCEED ONE HUNDRED DOLLARS ($100.00).
FPA-6300ESW is equipped with a wide-field lens
- By changing the projection magnification (4:1 → 3.125:1), Canon realized a wider exposure field with the reticle size remaining at 6 inches
is the only KrF scanner in the world that can expose full size CMOS image
sensor without stitching1 because 33 mm x 42.2 mm can be exposed in
FPA-6300ESW is a derivation of the proven FPA-6300ES6a platform
- FPA-6300ES6a scanners are already popular in the market
- FPA-6300ESW scanners adopt technology developed to support front-end-of-the-line semiconductor manufacturing processes and can realize the same uptime and reliability as FPA-6300ES6a scanners
- FPA-6300ESW features a scalable platform offering field upgrade plans to improve productivity and overlay accuracy
1 Stitching exposure: A method of increasing exposure field size by connecting two or more adjacent exposure regions. The positional accuracy and alignment of the adjacent exposure regions directly affects the yield.
† Prices and specifications subject to change without notice. Actual prices are determined by individual dealers and may vary.
View Full Technical Specs PDF
Main Unit Specs
Pellicle Particle Checker
SMIF OHT Compatible
PC Remote Console
Online Functions (GEM2)