The FPA-8000iW i-line stepper is designed for advanced Panel-Level Packaging (PLP) applications is the first Canon Semiconductor Lithography system supporting manufacturing using large panel substrates.
FPA-8000iW panel steppers employ proprietary projection optical systems designed to provide 1.0 μm resolution across a wide 52 x 68 mm exposure field. The FPA-8000iW helps enable PLP cost reduction and package scaling by providing high-productivity panel processing with a large exposure field and high resolution.
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Changes to Terms
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Disclaimer of Warranties and Limitation of Liability
WE DISCLAIM ALL WARRANTIES, EXPRESS OR IMPLIED, CONCERNING THE SERVICE INCLUDING THE IMPLIED WARRANTIES OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE AND NON-INFRINGEMENT. WITHOUT LIMITING THE PRECEDING SENTENCE, UNLESS OTHERWISE REQUIRED BY APPLICABLE LAW, IN NO EVENT WILL OUR, OR OUR LICENSORS’, AGGREGATE LIABILITY UNDER THESE TERMS WITH RESPECT TO ANY CLAIM EXCEED ONE HUNDRED DOLLARS ($100.00).
FPA-8000iW i-line stepper for large panel substrates up to 515 x 515 mm
- Wide exposure field (52 x 68 mm or 55 x 55 mm).
- High resolution of 1.0 μm is available across the wide exposure field.
- High resolution and wide exposure field combine to provide high-productivity and further miniaturization, a larger device size and cost reduction for semiconductor packaging.
Supports high-productivity packaging on large substrates
- In response to packaging processes that use panel substrates, Canon developed a new stepper platform capable of handling large 515 x 510 mm panel substrates. Severe warpage is also common in large panel substrates and the new platform and panel-feeding system can overcome up to 10 mm of panel warpage. The FPA-8000iW can help customers realize high-productivity and efficiency for PLP production of large packages.
Achieves a resolution of 1.0 μm to enable advanced packaging
- Canon's original projection optical system supports a wide 52 x 68 mm exposure field while achieving 1.0 μm resolution, which is the finest resolution among packaging exposure systems that support panel substrate processes*. As a result, advanced packaging technology such as Panel Level Packaging can innovate to provide high integration and flexibility in electronic system design.
*Among same-class i-line steppers. With flatness equal to silicon wafer. Based on a December 10, 2018 Canon survey.
† Prices and specifications subject to change without notice. Actual prices are determined by individual dealers and may vary.