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Lithography Products

Welcome to the homepage for the Industrial Products Division of Canon U.S.A., Inc.

Please visit this site often for updated information and news about products, technologies, and services offered by Canon. 

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Lithography Products

Based in San Jose, California, the Canon U.S.A. Industrial Products Division supplies i-line and Deep UV (DUV) lithography systems that are used in the fabrication and packaging of high-tech devices including integrated circuits, hard disk read/write heads, Microelectromechanical Systems (MEMS) devices, image sensors, displays, power devices and LEDs. 

Canon photolithography equipment has also been developed to support the demands of Advanced Packaging, Through-Silicon Vias (TSV), Silicon Interposer and 3D Integration applications. 

Canon has the resources and the commitment to develop ultra-precision imaging technologies and to find smarter ways to apply them to achieve the highest performance and value. 
This smarter thinking is Enlightened Lithography–the unique Canon value that ensures the best return on our customers' investment. 

For support, service and product inquiries, please contact semi-info@cusa.canon.com.

FPA 3030i5 plus lithography stepper

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FPA-5520iV i-Line Stepper

FPA-5520iV i-Line Stepper for Advanced Packaging

Advanced Packaging is a growing area for many semiconductor manufacturing companies in the last decade. Learn about the challenges involved in Advanced Packaging and how the FPA-5520iV i-Line Stepper addresses them. General specifications are included as well.

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FPA-6300 DUV Scanner on a grey background

DUV Lithography

KrF (248nm wavelength)

Canon KrF scanners are key IC production tools with enhanced lens capabilities and mechanical advancements that support sub-wavelength imaging techniques.

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Steppers

Steppers

i-Line & DUV steppers

Canon i-line (365 nm wavelength) and DUV (248 nm wavelength) steppers are designed to provide cost-effective imaging for applications requiring flexible substrate handling and resolution as low as 150 nm.

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Flat-Panel Exposure Systems

Flat-Panel Exposure Systems

Mirror Projection Mask Aligners

Canon MPAsp Series Flat-Panel Exposure Systems utilize mirror projection technology for fabrication of Ultra-High Resolution display & innovative panel applications.

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Pre-owned Equipment

Canon CPO Equipment Program

Responding to the demands of the market, Canon U.S.A.'s Product Optimization (CPO) Equipment Program offers benefits to customers seeking an all-inclusive used Canon legacy photolithography equipment solution. Read more about the equipment we support and the services we offer by clicking on the “Learn More” button below. Also, please send any questions you have on the following page.

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Learn about Canon Industrial Product Technology

Nanoimprint Lithography
Canon's FPA-1200NZ2C nanoimprint semiconductor lithography equipment in use at Toshiba Memory's Yokkaichi Operations plant, Japan.

Learn how Canon Nanoimprint Lithography can revolutionize the semiconductor industry.
Learn More >

Canon Optical Lithography Equipment


Learn about Canon Optical Lithography Equipment Technology.
Learn More >

Flat-Panel Exposure Systems


Learn about Canon Flat-Panel Exposure Equipment Technology.
Learn More >

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Canon Industrial Products

ENABLING A WORLD OF INNOVATIONS

Click the button below to see the full catalog of Canon Industrial Products.

Contact Us

Find contact information for specific departments for support, service, and product inquiries.

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Industrial Solution and Services

Industrial Solution & Services

From Canon Application Services to Semiconductor Training, learn about solutions and services for your Industrial needs.