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ML3000 HDD Media PVD

Storage Device Manufacturing

  • Provides approximately twice the productivity compared to competitive equipment
  • Continuous operation for more than 10 days
  • Expandable configuration allows addition of chambers according to process requirements
  • Emphasis on vacuum quality to improve magnetic characteristics
  • Provides high temperature heating and cooling units for the development of next generation thermally assisted magnetic recording media

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  • System configuration: Inline type
  • Substrate size: 2.5 inch, 3.5 inch
  • Productivity: Up to 1800 disks/hour (depending on equipment configuration and process time)
  • Vacuum performance: Ultimate pressure around 10-6 Pa
  • Pumping system: Selectable between TMP and cryo pump
  • Footprint: 90 m2 (P22 configuration)

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† Prices and specifications subject to change without notice. Actual prices are determined by individual dealers and may vary.

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